کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5424851 | 1395839 | 2007 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Combined AFM and Brewster-angle analysis of gradually etched ultrathin SiO2 - Comparison with SRPES results
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کلمات کلیدی
Etching - اچینگSilicon oxides - اکسید سیلیکونSurface structure, morphology, roughness and topography - ساختار سطح، مورفولوژی، زبری و توپوگرافیsilicon - سیلیسیم Reflection spectroscopy - طیف سنجی بازتابیSynchrotron radiation photoelectron spectroscopy - طیف سنجی فوتوالکتریک تابش Synchrotronatomic force microscopy - میکروسکوپ نیروی اتمیDielectric phenomena - پدیده های دی الکتریک
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Two surface sensitive techniques are employed to assess both structural and optical properties of an inhomogeneous Si(1Â 1Â 1)/silicon oxide multilayer system. Upon gradual etch-back of the native silicon oxide layer, structural changes of the respective interfaces were determined by contact-mode atomic force microscopy (CM-AFM); optical data were obtained by Brewster-angle analysis (BAA) at a single wavelength. It is shown, that the sensitivity of BAA leads to the identification of an additional strained sub-surface layer that was investigated by subsequent etching experiments and following optical analysis. Inclusion of this layer and its interfaces into a multilayer model allowed precise numerical evaluation of the respective oxide thicknesses in the range between 12Â Ã
and 2Â Ã
. These values, obtained by combination of BAA and AFM, are in excellent agreement with results obtained by synchrotron radiation photoelectron spectroscopy (SRPES). It is furthermore shown, that the thickness resolution limit of BAA (at constant nanotopographic roughness) is well below 1Â Ã
. A limitation of BAA single-wavelength analysis is reached when the roughness variation, in terms of an effective layer and its thickness, exceeds the oxide thickness variation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 601, Issue 7, 1 April 2007, Pages 1693-1700
Journal: Surface Science - Volume 601, Issue 7, 1 April 2007, Pages 1693-1700
نویسندگان
M. Lublow, H.J. Lewerenz,