کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
542639 871564 2007 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effects of precursor aging and post-deposition treatment time on photo-assisted sol–gel derived low-dielectric constant SiO2 thin film on Si
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Effects of precursor aging and post-deposition treatment time on photo-assisted sol–gel derived low-dielectric constant SiO2 thin film on Si
چکیده انگلیسی

In this paper, we have reported the results of sol–gel derived low dielectric constant SiO2 treated with UV light as a function of precursor aging time and post-deposition UV exposure time. Filmetrics, Fourier-transform infrared, and scanning electron microscope were employed to characterize the films. Precursor aged for the longest time (4 days) has demonstrated the lowest refractive index, which can be related to reduction of dynamic dielectric constant (ke). However, when the UV exposure time increased, the ke value also increased. These observations have been explained in the text.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 38, Issue 2, February 2007, Pages 227–230
نویسندگان
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