کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5426416 1395889 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography
چکیده انگلیسی

We present our investigation on the early stage of the photon induced desorption of oxide nanostructures grown on GaAs/AlAs/GaAs heterostructures. The oxide structures were fabricated by local anodic oxidation performed by means of an atomic force microscope. We observed that after a first rapid evolution in which a thick layer of heterogeneous material is removed, the oxide composition remains almost constant. These results support our model in which the oxidation process on a layered material resembles a melting process and produces a mixed material whose composition is the average of the initial one.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 600, Issue 18, 15 September 2006, Pages 3739-3743
نویسندگان
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