Analysis of the electrical characteristics of power LDMOSFETs having different design parameters under various temperature

In this paper, we have investigated the electrical characteristics of power lateral double-diffused MOSFETs (LDMOSFETs) having different gate lengths (2.1–3 μm) and drift lengths (6.6–12.6 μm) in the temperature range 100–500 K. The results of this study indicate that gate length and drift region length have a great effect on electrical characteristics, but they have little effect on temperature dependence. The specific on-resistance and the off-state breakdown voltage increase with temperature. The result shows that the specific on-resistance increases exponentially with the exponent 2.2 and, by contrast, the off-state breakdown voltage increases linearly with a slope of 100 mV/K (drift region concentration of measured device: 2×1015 cm−3). As a result, Ron/BV, known for a figure of merit of power device, increases with temperature.