Nanoscale temperature sensor based on Fano resonance in metal-insulator-metal waveguide

In order to realize temperature measurements with high sensitivity using compact structure, a nanoscale metal-insulator-metal waveguide based sensor combining with Fano resonance is proposed in this paper. Sealed ethanol in resonant cavity is adopted to further improve sensing performance. Additionally, dual resonant cavity based configuration is designed to generate a Fano-based sharp and asymmetric spectrum, providing high figure of merit in measurements. Moreover, structural parameters are optimized considering both transmission rate and spectral peak width. Certified by numerical calculation, sensitivity of 0.36 nm/°C is acquired with the optimized structure, indicating the designed sensor can play an important role in the nano-integrated plasmonic devices for high-accurate temperature detection.