کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5458321 1516169 2017 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Low temperature deposition of highly transparent and conducting Al-doped ZnO films by RF magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
Low temperature deposition of highly transparent and conducting Al-doped ZnO films by RF magnetron sputtering
چکیده انگلیسی
Radio frequency (rf) magnetron sputtering process was optimized to deposit highly conducting and transparent polycrystalline Al-doped ZnO (ZnO:Al or AZO) films at low temperature. Deposition was done in pure argon atmosphere on unheated glass substrates. Various properties of AZO films, such as residual stress, crystallite size, Al content, carrier concentration and mobility, resistivity, optical transmittance, band-gap and refractive index were measured and their variation with deposition power and working pressure was analyzed. In the first step deposition power was varied from 200 W to 1200 W at a constant working pressure, and then in the next step working pressure was varied from 0.05 to 0.5 Pa while keeping deposition power constant at the optimized value. Film thickness was maintained constant at 600 ± 50 nm. Obtained results were compared with those of other researchers wherever possible. With increasing deposition power it was observed that film properties improve up to a certain power and then start to deteriorate with further increase of power. Electrical properties were found to depend more strongly on structural properties of films, compared to optical properties. At optimized deposition power film properties showed a weaker dependence on working pressure in the used range. Best quality AZO films with 6.7 × 10−4 Ω-cm electrical resistivity and 90% average visible transmittance were obtained at 600 W deposition power and 0.1 Pa working pressure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 725, 25 November 2017, Pages 60-68
نویسندگان
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