Capacitive humidity sensing properties of CdS/ZnO sesame-seed-candy structure grown on silicon nanoporous pillar array

A nanosystem composed of CdS/ZnO sesame-seed-candy structure and the underlying Si-NPA substrate was prepared and its humidity-sensing properties were studied. Recur to the unique hierarchical nanostructure, humidity-sensing properties of high sensitivity, short response/recovery times and small hysteresis were obtained. CdS/ZnO/Si-NPA might be an ideal material for humidity detection.136