کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5460929 1516200 2017 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Enhancement of Ga-doped zinc oxide film properties and deposition rate by multiple deposition using atmosphere pressure plasma jet
ترجمه فارسی عنوان
افزایش خواص فیزیکی فیلم اکسید روی گالوانیزه شده و میزان رسوب آن توسط چندین رسوب با استفاده از جت پلاسما فشار جو
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فلزات و آلیاژها
چکیده انگلیسی


- GZO film deposited on 180 °C glass in open air by atmospheric pressure plasma jet.
- Multiple depositions significantly enhance deposition rate and film properties.
- The resistivity (9.4 × 10−4 Ω cm) improved by 33%.
- The deposition rate (110 nm/min) improved by 35%.

Multilayer film with an interfacial buffer layer made of different material has been show to improve the film properties. However, it is not well understood if similar benefits may be achieved by multiple deposition of GZO without the addition of new interfacial materials. Here we prepared single-, double-, and triple-deposited GZO films on glass substrate (preheated to 180 °C) by atmosphere pressure plasma jet (APPJ). We found that the triple-deposited film exhibits overall enhancement over the single-deposited film in deposition rate (110 nm/min) and the key properties, such as resistivity (9.4 × 10−4 Ω cm), crystallite size (16 nm), carrier concentration, mobility, and band gap. In particular, the resistivity and deposition rate are significantly improved by 33% and 35%, respectively. The results are attributed to the mitigation of lattice-mismatch between the film and the glass substrate by the bottom thin GZO film. The findings may also be applied to other deposition methods with moving nozzle or moving stage such as spray pyrolysis.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 694, 15 February 2017, Pages 452-458
نویسندگان
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