کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5461420 | 1516199 | 2017 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Pattern transfer of hexagonal packed structure via ultrathin metal nanomesh masks for formation of Si nanopore arrays
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
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چکیده انگلیسی
We demonstrate that ultrathin Au nanomesh assisted in transferring pattern of hexagonal packed anodic aluminum oxide (AAO) membrane for formation of Si nanopore arrays. In this technology, the regularity of the AAO mask was inherited by the ultrathin Au nanomesh, which was pressed into the polymethyl methacrylate (PMMA) layer spin-coated on Si substrate. The fixed ultrathin Au nanomesh kept a close contact to the Si substrate through the PMMA layer. The pattern transfer of hexagonal packed AAO membrane to Si substrate was achieved using inductively coupled plasma (ICP) and highly orderly Si nanopore arrays were prepared in this work. Our technology improves the pattern fidelity and reduces defects.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 695, 25 February 2017, Pages 458-461
Journal: Journal of Alloys and Compounds - Volume 695, 25 February 2017, Pages 458-461
نویسندگان
Zeping Li, Zhimou Xu, Xiaopeng Qu, Shuangbao Wang, Jing Peng,