High performance humidity sensor based on metal organic framework MIL-101(Cr) nanoparticles

Metal organic framework MIL-101(Cr) nanoparticles were successfully HF- free synthesized via hydrothermal method and characterized by X-ray diffraction (XRD), scanning electron microscope (SEM) and Nitrogen adsorption-desorption technology. Then resistive humidity sensor was fabricated to investigate humidity sensing properties. The results indicate that the sensor shows high sensitivity and rapid response-recovery time. The impedance changes more than three orders of magnitude in the range of 33-95% RH at 100 Hz. The response time and recovery time are 17 s and 90 s respectively. Finally, the humidity sensing mechanism was discussed through complex impedance analysis. The results illustrate that porous MIL-101(Cr) nanoparticles have great potential to be used as humidity sensing materials.