کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
546471 871909 2008 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A comparison of thin film microrefrigerators based on Si/SiGe superlattice and bulk SiGe
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
A comparison of thin film microrefrigerators based on Si/SiGe superlattice and bulk SiGe
چکیده انگلیسی

Most of the conventional thermal management techniques can be used to cool the whole chip. Since thermal design requirements are mostly driven by the peak temperatures, reducing or eliminating hot spots could alleviate the design requirements for the whole package. Monolithic solid-state microcoolers offer an attractive way to eliminate hot spots. In this paper, we review theoretical and experimental cooling performance of silicon-based microrefrigerators on a chip. Both Si/SiGe superlattice and also bulk SiGe thin film devices have been fabricated and characterized. Direct measurement of the cooling along with material characterization allows us to extract the key factors limiting the performance of these microrefrigerators. Although Si/SiGe superlattice has larger thermoelectric power factor, the maximum cooling of thin film refrigerators based on SiGe alloys are comparable to that of superlattices. This is due to the fact that the superlattice thermal conductivity is larger than bulk SiGe alloy by about 30%.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 39, Issue 7, July 2008, Pages 981–991
نویسندگان
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