Microstructure and nanomechanical properties of co-deposited Ti-Cr films prepared by magnetron sputtering

Pure Ti and Ti-Cr films of various Cr content (< 40 at.% Cr) were prepared on the surface of aluminum alloy by using DC magnetron sputtering. Ti-Cr alloy films exhibited a bcc structure (β phase) stabilized with Cr addition. Pure Ti and Ti-Cr alloy films displayed (002) and (110) preferred orientations, respectively. The denser morphologies and finer grains were achieved for Ti-Cr films with increasing the Cr content. Compared with that of pure α-Ti film, Ti-Cr films (β type) showed remarkable increase in hardness (~ 6.0 GPa). The further increasing Cr content (> 10 at.% Cr) slightly changed the hardness and elastic modulus of Ti-Cr films with β structure.. The analysis of H-E ratio (H3/E2and H/E) indicated the better plastic and wear resistance of Ti-Cr films than that of pure Ti films.