Improved surface quality of layered architecture TiAlTaN/Ta coatings for high precision micromachining

High surface quality coatings play an important role in producing high precision coating tools for micromachining. This study focuses on the improvement of the coating surface quality by layered design method. The layered TiAlTaN/Ta coatings have been prepared by magnetron sputtering. SEM and AFM results revealed that the continuous growth of the columnar TiAlTaN crystals can be interrupted by layered design. The columnar crystal size of TiAlTaN coating decreased with the decreasing bilayer thickness. The coating surface roughness also gradually decreased from 36.6 ± 1.2 to 11.54 ± 0.6 to 8.9 ± 0.1 nm. Nanoidentation results showed an increasing coating hardness from 16 GPa to 20 GPa with decreasing bilayer thickness. Friction and wear test revealed that the coating friction coefficient increases from 0.70 to 0.93, then decreases to 0.62 with decreasing bilayer thickness. The layered method can improve mechanical and friction properties, meanwhile reducing surface roughness, which makes it a potentially promising method for fabricating high precision micromachining coating tools.