Al contacts to nanoroughened p-GaN

Nanoroughening of a p-GaN surface using nanoscale Ni islands as an etch mask was utilized to investigate the feasibility for the flip-chip configuration light-emitting diodes (LEDs) using an Al-based reflector. Improved ohmic characteristics were found for the nanoroughened sample. A specific contact resistivity of 8.9×10−2 Ω cm2 and a reflectance of 82% at 460 nm were measured for the nanoroughened Al contact. The Schottky barrier heights were decreased from 0.81 eV (I–V) and 0.84 eV (Norde) for the Al contact to 0.70 eV (I–V) and 0.69 eV (Norde) for the nanoroughened Al contact. The barrier height reduction may be attributed to enhanced tunneling and the increased contact area due to the nanoroughening. This work suggests that the ohmic contact characteristics and the light extraction efficiency may be improved further with a well-defined nanopatterned p-GaN layer.