Structural characteristics of carbon nanostructures synthesized by ECR-CVD

In this study, carbon nanotubes (CNTs) and nanoparticles were synthesized by an electron cyclotron resonance-chemical vapor deposition (ECR-CVD) system. Results show that both high- and low-aspect-ratio CNTs and nanoparticles are found. The CNTs range in length from tens of nanometers to micrometers, and in outer diameter from about 5 to 50 nm. Transmission electron microscope (TEM) images show that the faceted nanoparticles exhibit polyhedral or onion or irregularly profiled fullerene structures, and the CNTs growth is from the interlayers lamination. The surface sheet resistance and average surface roughness of the CNT films are about 360 Ω per square and 7–17 nm, respectively. When the CNT sample has a higher amount of nanoparticles, the current density will be increased.