کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
615697 1454859 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A novel tribometer for the measurement of friction in MEMS
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی شیمی کلوئیدی و سطحی
پیش نمایش صفحه اول مقاله
A novel tribometer for the measurement of friction in MEMS
چکیده انگلیسی

A new tribometer has been developed to determine friction under conditions that are representative of MEMS (micro-electro-mechanical-systems). The tribometer consists of a rotating silicon disc, loaded against a stationary silicon disc. Friction and film thickness values are measured using laser displacement techniques. In this study, two different test set-ups were used: a flat on flat specimen geometry, and a moving flat against a structured surface, similar to that of a miniature thrust pad bearing. Using this tribometer, hydrodynamic tests have been carried out with the specimens fully submerged in hydrocarbon lubricants. Results suggest that friction increases with sliding speed and decreases with increasing applied normal load, which is in accordance with the hydrodynamic theory.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Tribology International - Volume 43, Issues 5–6, May–June 2010, Pages 1087–1090
نویسندگان
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