Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy

We report here the design of a new three-dimensional structured porous silicon membrane having an accordion shape by anodizing of anisotropic KOH etched silicon wafer. A complete process is described and an application example as contamination detection of organic volatile by FTIR spectroscopy is proposed.

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► Accordion structured porous silicon membrane.
► Cancellation of interference pattern in transmission infrared spectroscopy.
► FTIR detection of contamination from packaging.