کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
638877 1456191 2006 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A new process for the manufacturing of reproducible mesoporous silicon membranes
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی تصفیه و جداسازی
پیش نمایش صفحه اول مقاله
A new process for the manufacturing of reproducible mesoporous silicon membranes
چکیده انگلیسی

We report here the manufacturing of thick reproducible mesoporous silicon membranes with the description of the complete process. In the case of porous membranes, the advantages of using silicon are the possibility to use standard microfabrication techniques like wet and dry etching and then the easy integration with microelectronic systems and MEMS applications. Problems encountered and solutions are discussed. An application as a proton-conducting membrane for miniature fuel cells is proposed and has been implemented with encouraging results.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Membrane Science - Volume 280, Issues 1–2, 1 September 2006, Pages 494–500
نویسندگان
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