کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6481483 1398876 2016 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structural and mechanical evolution of TiAlSiN nanocomposite coating under influence of Si3N4 power
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Structural and mechanical evolution of TiAlSiN nanocomposite coating under influence of Si3N4 power
چکیده انگلیسی


- We investigate the role of Si3N4 power in TiAlSiN nanocomposite coating.
- Structural and mechanical property changes with Si3N4 power.
- Hardness and film growth relationship has been estabilished in vew of SZM model.
- Best mechanical properties are achieved when the Si3N4 power is 70 W.

In this study, we have reported the microstructural and mechanical properties of nanocrystalline Titanium Aluminum Nitride (TiAlN) embedded in amorphous Silicon Nitride (Si3N4) nanocomposite films. The films were deposited on Si substrate by using DC\RF reactive magnetron co-sputtering of TiAl and Si3N4 targets by varying power to the Si3N4 target. The films were investigated using grazing incident X-ray diffraction (GIXRD), Raman spectroscopy, field emission scanning electron microscopy (FESEM), energy dispersive X-ray spectroscopy (EDS), stylus profiler and nanoindentation. GIXRD shows the formation of crystalline cubic Ti3AlN phase in the films. With the increase in Si3N4 power, crystal growth of TiAlN diminishes. FESEM micrographs showed the uniformly distributed, well developed, sharp-edged, irregular shaped grains on the surface of the films. The silicon-rich region was observed at inter-grain boundary region and the micrographs visualize the presence of amorphous Si3N4 on the edge of crystal grains. The amorphous content increases with Si3N4 power. EDS confirms the presence of all elements in the films. The optimum mechanical properties were observed at 70 W Si3N4 target power. Hardness, elastic modulus, elastic recovery and resistance to plastic deformation of film rises from 40 W to 70 W target power and then reduces at 90 W.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 307, Part A, 15 December 2016, Pages 676-682
نویسندگان
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