Power production from phase change in MEMS and micro devices, a review

The use of phase change for power production on the small scale is reviewed in this paper. Important contributions from many authors are considered. There have been a wide variety of approaches and devices created using MEMS techniques dependent on working fluid phase change to achieve power output. These include traditional cycles like the Rankine Cycle, downsized for MEMS application. A large selection of phase change micro-actuators has also been studied using MEMS-based approaches. These actuators have been designed for operation of valves or other systems requiring mechanical input. Other approaches have included novel thermodynamic cycles that are exclusive to microfabrication and MEMS-based devices. Each of these phase change devices shares several commonalities related to the control of heat transfer and efficiency of operation. This has resulted in the design and implementation of innovative features, multiple working fluids, and careful material selection.