کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
689276 | 889601 | 2011 | 8 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: A G&P EWMA algorithm for high-mix semiconductor manufacturing processes A G&P EWMA algorithm for high-mix semiconductor manufacturing processes](/preview/png/689276.png)
In mixed run processes, typical in semiconductor manufacturing and other automated assembly-line type process, products with different recipes will be produced on the same tool. Product based run-to-run control can be applied to improve the process capability. The effect of product-based controller on low frequency products is, however, minimal, due to inability to track tool variations. In this work, we propose a group and product based EWMA control scheme which combines adaptive k-means cluster method and run-to-run EWMA control to improve the performance of low frequency products in the mixed run process. Similar products could be classified into the same group adaptively and controlled by a group EWMA controller. The group controller is updated by both low frequency products and similar high frequency products; so that low frequency products can be improved by shared information from similar large frequency products. However, the high frequency products are controlled by individual product-based EWMA to avoid interference of the low frequency products. The advantages of proposed control scheme are demonstrated by benchmark simulation and reversed engineered industrial applications.
Journal: Journal of Process Control - Volume 21, Issue 1, January 2011, Pages 28–35