Keywords: کنترل اجرای; Autoregressive moving average noise; EWMA algorithm; Metrology delays; Robust optimal design; Robust stability; Run-to-run control;
مقالات ISI کنترل اجرای (ترجمه نشده)
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Keywords: کنترل اجرای; Artificial pancreas; Diabetes; Case-based reasoning; Run-to-Run control;
Keywords: کنترل اجرای; Run-to-run control; data-sampled system; varying time delays; stability analysis
Multiscale modeling and run-to-run control of PECVD of thin film solar cells
Keywords: کنترل اجرای; Process modeling; Plasma-enhanced chemical vapor deposition; Thin film solar cells; Multiscale modeling; Parallel computing; Run-to-run control;
Run-To-Run control of the Czochralski process
Keywords: کنترل اجرای; Run-To-Run control; Model predictive control; Czochralski process;
A method for handling batch-to-batch parametric drift using moving horizon estimation: Application to run-to-run MPC of batch crystallization
Keywords: کنترل اجرای; Run-to-run control; Parameter estimation; Moving horizon estimation; Model predictive control; Batch crystallization; Crystal shape control;
Coordination and control of batch-based multistage processes
Keywords: کنترل اجرای; Batch allocation; Multistage processes; Run-to-run control; Clustering algorithm;
Prediction of time-varying metrology delay for dEWMA and RLS-LT controllers
Keywords: کنترل اجرای; Run-to-run control; Metrology delay; Recursive least squares; EWMA control;
Deterministic and stochastic model based run-to-run control for batch processes with measurement delays of uncertain duration
Keywords: کنترل اجرای; Batch processes; Minimum entropy control; Model based control; Probability density function; Run-to-run control
Performance Analysis of Takagi–Sugeno Fuzzy Model For Run-to-run Control with Stochastic Metrology Delay
Keywords: کنترل اجرای; Takagi–Sugeno model; exponentially weighted moving average (EWMA); run-to-run control; stochastic metrology delay
A G&P EWMA algorithm for high-mix semiconductor manufacturing processes
Keywords: کنترل اجرای; Run-to-run control; EWMA; Mixed run process; k-Means cluster
CMP process run-to-run control to adjust margin in control limit
Keywords: کنترل اجرای; Semiconductor device manufacture; Chemical mechanical polishing; Within-wafer distribution; Run-to-run control; Advanced process control; Quality control
Stability analysis and optimal tuning of EWMA controllers – Gain adaptation vs. intercept adaptation
Keywords: کنترل اجرای; Exponentially weighted moving average (EWMA); Stability; Optimal weighting; State-space representation; The Kalman filter; Run-to-run control
Robust forecasts and run-to-run control for processes with linear drifts
Keywords: کنترل اجرای; Run-to-run control; Robust control; Linear drifts; Minimax techniques;
Minimum entropy based run-to-run control for semiconductor processes with uncertain metrology delay
Keywords: کنترل اجرای; Minimum entropy; Probability density function; Run-to-run control
Mixed product run-to-run process control – An ANOVA model with ARIMA disturbance approach
Keywords: کنترل اجرای; Run-to-run control; Mixed product system; Dynamic ANOVA; ARIMA disturbance model
The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control
Keywords: کنترل اجرای; Run-to-run control; Threaded double exponentially weighted moving average (threaded-dEWMA); “Trade-off” solution; Fault tolerant
Survey on iterative learning control, repetitive control, and run-to-run control
Keywords: کنترل اجرای; Iterative learning control; Repetitive control; Run-to-run control; Repetitive process; Batch process; Run-based process
Identification of tool and product effects in a mixed product and parallel tool environment
Keywords: کنترل اجرای; State estimation; ANOVA; Kalman filter; Run-to-run control
One step forward from run-to-run critical dimension control: Across-wafer level critical dimension control through lithography and etch process
Keywords: کنترل اجرای; Run-to-run control; Advanced process control; Critical dimension uniformity (CDU); CD variation; Post-exposure bake (PEB) temperature; Model based process control
On the interaction between measurement strategy and control performance in semiconductor manufacturing
Keywords: کنترل اجرای; Semiconductor manufacturing; Measurement strategy; Controller design; Run-to-run control
PLS based dEWMA run-to-run controller for MIMO non-squared semiconductor processes
Keywords: کنترل اجرای; Chemical–mechanical polishing; Partial least squares; Run-to-run control
Controllability and stability of repetitive batch processes
Keywords: کنترل اجرای; Batch Processes; Repetitive dynamic processes; On-line control; Run-to-run control; Controllability; Stability
Run-to-run control and state estimation in high-mix semiconductor manufacturing
Keywords: کنترل اجرای; Run-to-run control; State estimation; Semiconductor; Manufacturing; Recursive least squares; Control threads
Stability and performance analysis of mixed product run-to-run control
Keywords: کنترل اجرای; Run-to-run control; Mixed product system; “Tool-based” control; “Product-based” control; Exponential weighted moving average (EWMA)
Semiconductor manufacturing process control and monitoring: A fab-wide framework
Keywords: کنترل اجرای; Semiconductor manufacturing; Fab-wide control; Electrical parameter control; Run-to-run control; Fault detection and classification; Metrology data monitoring