کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
689438 889610 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Prediction of time-varying metrology delay for dEWMA and RLS-LT controllers
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی تکنولوژی و شیمی فرآیندی
پیش نمایش صفحه اول مقاله
Prediction of time-varying metrology delay for dEWMA and RLS-LT controllers
چکیده انگلیسی
This paper investigates how to adaptively predict the time-varying metrology delay that can realistically occur in the semiconductor manufacturing practice. In the presence of metrology delays, the expected asymptotic double exponentially weighted moving average (dEWMA) control output, by using the EWMA and recursive least squares prediction methods, is derived. It has been found that the relationships between the expected control output and target in both estimation methods are equivalent, and six cases are addressed. Within the context of time-varying metrology delay, a new time update scheme to the recursive least squares-linear trend (RLS-LT) controller, combined with zone tests and the moving average (MA) control chart, is proposed. Simulated single input-single output (SISO) run-to-run processes subject to two time-varying metrology delay scenarios are used to assess the effectiveness of the proposed controller.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Process Control - Volume 22, Issue 4, April 2012, Pages 823-828
نویسندگان
, , , , ,