Nanomechanical and nanotribological behavior of ultra-thin silicon-doped diamond-like carbon films

Diamond-like carbon (DLC) film with ultra-thin thickness displays high internal stress, thereby resulting in the failure of protection to the substrate. Incorporation of silicon into DLC films, which has higher adhesion to substrate and extraordinary thermal stability, can be potentially used in heat assisted magnetic recording (HAMR). The nanomechanical and nanotribological behavior of Si doped DLC films is investigated using molecular dynamic simulation method. Effects of the Si content and density of Si-DLC films on the frictional behavior and wear resistance of Si-DLC films are investigated. Surface profiles at the contact interface are identified before and after sliding.