Computational Fluid Dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor

Computational Fluid Dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Chemical Engineering Research and Design - Volume 132, April 2018, Pages 795-811

G.P. Gakis, H. Vergnes, E. Scheid, C. Vahlas, B. Caussat, A.G. Boudouvis,