کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
700799 890935 2011 15 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A review of diamond synthesis by CVD processes
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
A review of diamond synthesis by CVD processes
چکیده انگلیسی

Diamond has some of the most extreme mechanical, physical and chemical properties of all materials. Within the last 50 years, a wide variety of manufacturing methods have been developed to deposit diamond layers under various conditions. The most common process for diamond growth is the chemical vapor deposition (CVD). Starting from the first publications until the latest results today, a range of different developments can be seen. Comparing the basic conditions and the process parameters of the CVD techniques, the technical limitations are shown. Processes with increased pressure, flow rate and applied power are the general tendency.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 20, Issue 9, October 2011, Pages 1287–1301
نویسندگان
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