کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
700835 890940 2011 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Mechanical properties of MWPECVD diamond coatings on Si substrate via nanoindentation
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Mechanical properties of MWPECVD diamond coatings on Si substrate via nanoindentation
چکیده انگلیسی

The mechanical properties of polycrystalline diamond coatings with thickness varying from 0.92 to 44.65 μm have been analysed. The tested samples have been grown on silicon substrates via microwave plasma enhanced chemical vapour deposition from highly diluted gas mixtures CH4–H2 (1% CH4 in H2). Reliable hardness and elastic modulus values have been assessed on lightly polished surface of polycrystalline diamond films.The effect of the coating thickness on mechanical, morphological and chemical-structural properties is presented and discussed. In particular, the hardness increases from a value of about 52 to 95 GPa and the elastic modulus from 438 to 768 GPa by varying the coating thickness from 0.92 to 4.85 μm, while the values closer to those of natural diamond (H = 103 GPa and E = 1200 GPa) are reached for thicker films (> 5 μm). Additionally, the different thickness of the diamond coatings permits to select the significance of results and to highlight when the soft silicon substrate may affect the measured mechanical data. Thus, the nanoindentation experiments were made within the range from 0.65% to 10% of the film thickness by varying the maximum load from 3 to 80 mN.

Research Highlights
► 190: diamond film.
► 560: plasma CVD.
► 430: mechanical properties characterization.
► 450: morphology.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 20, Issue 2, February 2011, Pages 221–226
نویسندگان
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