کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
701085 1460815 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Low friction and protective diamond-like carbon coatings deposited by asymmetric bipolar pulsed plasma
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Low friction and protective diamond-like carbon coatings deposited by asymmetric bipolar pulsed plasma
چکیده انگلیسی

Diamond-like carbon (DLC) thin films have been prepared at room temperature by plasma-enhanced chemical vapour deposition (PECVD) using pulsed-DC power and CH4 as precursor. Tribological tests of these DLC films have been carried out with a nanotribometer and a calotest instrument adapted for wear measurements. Friction coefficients ranged from 0.15 to 0.20, which differ from values obtained by other techniques. In this study we have systematically measured the abrasive wear rate and friction coefficient of DLC films deposited at different conditions (pulse frequency and peak voltage), and we have discussed the results in terms of DLC structure and surface morphology. These films could find application as ultrathin anti-friction and anti-wear protective coatings, hydrophobic coatings, gas diffusion barriers and dielectric layers in electronic devices.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 18, Issues 5–8, May–August 2009, Pages 1035–1038
نویسندگان
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