کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
701172 1460818 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Photoconductivity of DLC film deposited by pulsed discharge plasma CVD
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Photoconductivity of DLC film deposited by pulsed discharge plasma CVD
چکیده انگلیسی

DLC films were deposited by a new pulsed DC discharge plasma chemical vapour deposition (CVD) using hydrogen and methane gas mixture. When methane concentration (Cm) i.e. CH4/(H2 + CH4) was increased from 3 to 40%, the graphitization of the carbon film increases as evident from Raman study. When Cm was increased to 30%, DLC film shows photoconducting property. The white light photoconductivity (S = Il/Id, where Il is light current and Id is dark current) measured with solar simulator under AM 1.5 condition was approximately 20 at room temperature. The photoconductivity was not clear when Cm was lower than 20%. ESR measurements also show that the electron spin density was slightly decreased with decreasing concentration of methane. Thus we can conclude here that at higher concentrations of methane at 30%, Sp2 content of the film increases and the DLC film becomes photoconducting.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 17, Issues 4–5, April–May 2008, Pages 676–679
نویسندگان
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