کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
701177 | 1460818 | 2008 | 4 صفحه PDF | دانلود رایگان |
Diamond-like carbon (DLC) thin films were deposited on silicon and ITO substrates with applying different negative bias voltage by microwave surface wave plasma chemical vapor deposition (MW SWP-CVD) system. The influence of negative bias voltage on optical and structural properties of the DLC film were investigated using X-ray photoelectron spectroscopy, UV/VIS/NIR spectroscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. Optical band gap of the films decreased from 2.4 to 1.7 with increasing negative bias voltage (0 to − 200 V). The absorption peaks of sp3 CH and sp2 CH bonding structure were observed in FT-IR spectra, showing that the sp2/sp3 ration increases with increasing negative bias voltage. The analysis of Raman spectra corresponds that the films were DLC in nature.
Journal: Diamond and Related Materials - Volume 17, Issues 4–5, April–May 2008, Pages 696–699