FEM modeling of AlN/diamond surface acoustic waves device

This paper describes a general finite element method (FEM) for the AC steady state analysis of two-dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves corresponding to a AlN layer of 5.2 μm thick and a spatial periodicity of 12 μm. The structure admittance response shows peaks corresponding to the modes 0, 1, 2 and 3. The penetration depth in diamond is around 24 μm.