کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
701802 1460771 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Piezoresistive properties of diamond like carbon films containing copper
ترجمه فارسی عنوان
خواص پیزوئیدی مانند الماس مانند کربن که حاوی مس است
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
چکیده انگلیسی


• Diamond like carbon films containing copper (DLC:Cu) were studied.
• DLC:Cu films were deposited by reactive magnetron sputtering.
• High power pulsed magnetron sputtering was used.
• Gauge factor (GF) decreased with the increase of Cu atomic concentration and D/G ratio.
• GF quasilinearly increased with logarithm of the resistance of DLC:Cu films.

In the present study diamond like carbon films containing copper (DLC:Cu) were deposited by reactive magnetron sputtering. Direct current (DC) sputtering and high power pulsed magnetron sputtering (HIPIMS) were used. The influence of the composition and structure on piezoresistive properties of DLC:Cu films was investigated. Structure of DLC:Cu films was investigated by Raman scattering spectroscopy and transmission electron microscopy (TEM). Chemical composition of the films was studied by using energy-dispersive X-ray spectrometry (EDS) and X-ray photoelectron spectroscopy (XPS). Particularly analysis of XPS O1s spectra revealed oxidation of Cu nanoparticles. Piezoresistive gauge factor of DLC:Cu films was in 3–6 range and decreased with the increase of copper atomic concentration. Tendency of the decrease of the gauge factor of DLC:Cu films with the increased D/G peak area ratio (decreased sp3/sp2 carbon bond ratio) was observed. It was found that resistance (R) of DLC:Cu films decreased with the increase of Cu atomic concentration by logarithmic law. It is shown that a quasilinear increase of piezoresistive gauge factor with log(R) is in good accordance with percolation theory. Temperature coefficient of resistance (TCR) of DLC:Cu films was negative and decreased with copper amount in Cu atomic concentrations ranging up to ~ 40%. Very low TCR values (zero TCR) were observed only for DLC:Cu films with low gauge factor that was close to the gauge factor of the metallic strain gauges. Role of some possible mechanisms: copper amount as well as Cu cluster size on the value of gauge factor is discussed.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 60, November 2015, Pages 20–25
نویسندگان
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