کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
702013 | 891065 | 2011 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Towards characterisation of millimetre length waveguides and new fabrication method for nanoscale diamond photonic structures Towards characterisation of millimetre length waveguides and new fabrication method for nanoscale diamond photonic structures](/preview/png/702013.png)
We present a novel approach to achieving in-plane coupling for ridge waveguides fabricated in single crystal diamond through a modification to the graphitic implant process. The etched cross-section of a diamond ridge structure is examined to confirm roughness estimates and the trenching effect. Finally nanoscale optical cavities are fabricated in polycrystalline diamond using a new method of exposure using focussed ion beam as a hard mask to pattern the structures.
Research Highlights
► Masked ion implant and PDMS case used fabricating diamond waveguides.
► Diamond waveguides cover greater surface area of diamond crystal.
► Slot-waveguide cavity structures fabricated with focussed ion beam hard mask.
► TEM used to characterise waveguide structures in diamond.
Journal: Diamond and Related Materials - Volume 20, Issue 4, April 2011, Pages 556–559