High termination efficiency using polyimide trench for high voltage diamond Schottky diode

• We proposed a new termination architecture for diamond Schottky diode.
• We increase the efficiency of the termination up to 97%.
• We decrease the electric field peak value from 60 MV/cm down to 13 MV/cm.

Using finite element simulations with Sentaurus TCAD (Technology Computer-Aided Design) software, a progress from simple and classic termination for a Schottky diode to new topology termination has been studied in this paper. A polyimide trench under field plate termination has been used. The efficiency increases from 67% for a simple field plate with optimum parameters up to 97%. The maximum electric field in the termination dielectric has been evaluated also. A wide study of the termination geometry has been made in order to extract the optimum parameters in two directions. The first one is to obtain a high efficiency regarding the breakdown voltage, and the second one is to have the minimum electric field peak at the termination edge.

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