The interrelation between structure and mechanical properties of CNx (0 ≤ x ≤ 0.5) coatings obtained by graphite arc sputtering

Hardness, elastic modulus, internal stresses and friction coefficients were measured in CN0 ≤ x ≤ 0.5 coatings (1–3 μm). The dependence of these parameters on nitrogen concentration can be applied in the practical coatings. The structure investigations show that the domain amorphous matrix mixture consists of CNx ≤ 0.1 and CN0.5. Such structure allows understanding the dependence of the CN0 ≤ x ≤ 0.5 coatings properties on nitrogen concentration. Through the structure, the coating properties of CN0 ≤ x ≤ 0.5, depend on the nitrogen concentration.