کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
702663 | 1460812 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Diamond-like carbon deposited by plasma technique as a function of methane flow rate
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Diamond-like carbon deposited by plasma technique as a function of methane flow rate Diamond-like carbon deposited by plasma technique as a function of methane flow rate](/preview/png/702663.png)
چکیده انگلیسی
Diamond-like carbon (a-C:H) prepared by plasma enhanced chemical vapor deposition (PECVD) as a function of methane gas flow rate is reported. Films deposited at zero flow rate, i.e., without the use of vacuum pumps during the deposition, are also investigated. For that purpose, the reactor chamber was baked and pumped down to about 10−8 Torr to reduce contamination released from the reactor walls. The films were analyzed by visible, infrared and Raman spectroscopes. It was observed that the deposition rate, hydrogen concentration and optical gap depend on the methane gas flow rate. A maximum for deposition rate found at methane flow was much smaller than the flow usually adopted in conventional procedures.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 19, Issues 7–9, July–September 2010, Pages 756–759
Journal: Diamond and Related Materials - Volume 19, Issues 7–9, July–September 2010, Pages 756–759
نویسندگان
G.A. Viana, E.F. Motta, M.E.H.M. da Costa, F.L. Freire Jr., F.C. Marques,