Corrosion performance of thin hydrogenated amorphous carbon films prepared by magnetron sputtering

Hydrogenated amorphous carbon (a-CHx) films were prepared by magnetron sputtering at different H2/Ar gas flow ratios. Several sets of perpendicular magnetic recording disks with a-CHx overcoats of 5 nm were prepared for accelerated environmental corrosion test. The corrosion spots on the disks and the corrosion products were analyzed using optical surface analyzer and time-of-flight secondary ion mass spectroscopy, respectively. Other techniques, such as Raman spectroscopy, atomic force microscopy nano-scratch and contact angle measurement, were used to characterize the properties of a-CHx films. Compared to pure carbon overcoat, all the a-CHx overcoats have better corrosion resistance and higher polar component of surface free energy. The a-CHx film with appropriate H content shows the highest scratching resistance, and the corresponding disk has the lowest corrosion area on the disk surface after the accelerated corrosion.