کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
702876 | 1460816 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Microwave plasma generated in a narrow gap to achieve high power efficiency during diamond growth
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Single crystal diamonds were synthesized using a conventional configuration and a proposed configuration of reactors for microwave plasma chemical vapor deposition. The distributions of growth rate and substrate temperature were compared. Using relatively high gas pressure and moderate microwave input power the proposed configuration gave improved distributions. Secondary ion mass spectroscopy analysis did not indicate inclusion of metals which compose the boundaries of the discharge region of the proposed configuration. The power efficiency was estimated by the growth rate and the input power. Comparison with other systems implies that the proposed configuration gives similar or improved power efficiency.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 18, Issues 2–3, February–March 2009, Pages 117–120
Journal: Diamond and Related Materials - Volume 18, Issues 2–3, February–March 2009, Pages 117–120
نویسندگان
Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Shin-ichi Shikata,