Characterization of crystalline diamond incorporated diamond-like carbon films

The purpose of this paper is to show the production and characterization of diamond-like carbon (DLC) films with incorporated crystalline diamond (CD), produced by plasma enhanced chemical vapor deposition. CD-DLC films were characterized by scanning electron microscopy, X-ray diffraction, atomic force microscopy and Raman scattering spectroscopy. Wetting contact angle, stress and friction coefficient were also evaluated. Our results demonstrated CD-DLC films are more hydrogenated and hydrophobic, with higher fiction coefficient. The stress values kept almost constantly.