Piezoresistive, optical and electrical properties of diamond like carbon and carbon nitride films

In the present study diamond like carbon (DLC) and carbon nitride (a-CNx:H) films were deposited by closed drift ion source from the acetylene and nitrogen gas mixture. The piezoresistive, electrical and optical properties of ion beam synthesized DLC films were investigated. Piezoresistive properties of the diamond like carbon and carbon nitride films were evaluated by four point bending test. The piezoresistors were fabricated on crystalline alumina substrates using Al-based interdigitated finger type electrodes. Effects of the nitrogen concentration on the piezoresistive gauge factor were investigated. The dependence of the resistance of the metal/a-CNx:H/metal structures on temperature has been studied. Current–voltage (I–V) and capacitance–voltage characteristics were measured for a-CNx:H/Si heterostructures. The main current transport mechanisms were analyzed. Optical parameters of the synthesized films such as optical bandgap and B parameter (slope of the linear part of the Tauc plot) were investigated to study possible correlation with the piezoresistive properties.