Numerical and experimental studies of high growth-rate over area with 1-inch in diameter under moderate input-power by using MWPCVD

We have studied MWPCVD for synthesis of diamond crystals to achieve high growth-rates over an area with 1-inch in diameter under input-power less than 5 kW. The numerical and experimental studies have conducted for both of conventional and proposed configurations. Qualitative correspondences between the numerical predications and experimental observations were found. For both configurations, we have been able to achieve the growth-rates larger than 50 μm/h over the large area under the limited input-power.