Analytical modeling of microscale diaphragm compressors

► Analytical equations for modeling circular and square/rectangular compressors for a specific stroke are provided. ► Equations are provided for determining temporal variation of actuation pressure, chamber pressure and volume. ► Circular compressors are better than square compressors for pressure rise but the latter is better for flow rate. ► Actuation pressure can be minimized by using either materials of low Young's Modulus or thin diaphragms.