Optimization of effective parameters on Siemens reactor to achieve potential maximum deposition radius: An energy consumption analysis and numerical simulation

We perform numerical simulations to study effects of alternating current (AC) frequency on thermal stress evolution during the Joule heating process in a 48-rod Siemens reactor. The characteristics of temperature, current density, and stress distributions within the rods located in different rings are analyzed first. A Joule heating model using AC is then proposed for flexible power adjustment. The voltage-current curves are obtained from analysis of rod radius, location, and skin depth, as well as the properties of the polysilicon. The results indicate that, during the Joule heating process, large stresses typically occur in the central regions of the silicon rods. The highest stress occurs at the center of the silicon rods located in the outer ring when a standard power frequency of 50 Hz is utilized. The results further indicate that von Mises stress significantly decreases as AC frequency increases. Additionally, we propose a novel Joule heating method that is useful for producing larger high-purity polycrystalline silicon rods by considering both low frequency and high frequency power. Based on an analysis of energy consumption during the Joule heating process, we recommend optimized power supplies for the 48-rod Siemens reactor.