کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
708782 892034 2016 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Experimental Evaluation of Reset Control for Improved Stage Performance
ترجمه فارسی عنوان
ارزیابی تجربی کنترل بازنشانی برای بهبود عملکرد مرحله
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مکانیک محاسباتی
چکیده انگلیسی

A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: IFAC-PapersOnLine - Volume 49, Issue 13, 2016, Pages 93–98
نویسندگان
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