Effective pre-treatments of fullerenes to be sublimated for deposition of amorphous carbon films in electron beam excited plasma

► We have used fullerenes as carbon sources for deposition of amorphous carbon films. ► CH and OH bonds in the fullerenes degrade the deposited amorphous carbon films. ► Heat treatment and UV irradiation decrease the number of CH and OH bonds. ► Heat treatment and UV result in higher hardness and better adhesion of the films.