Investigation of depositing large area uniform diamond films in multi-mode MPCVD chamber

►Diamond films are prepared in a 10 kW, 2450 MHz MPCVD with multi-mode chamber. ►TM01 and TM02 are overlapped around the substrate to generate large scale plasma ball. ►Cone-shaped antenna introduces the microwave energy into chamber. ►The temperature variation is decreased obviously when substrate holder is improved. ►Diamond films (Φ = 80 mm) are obtained with high uniformity of morphology and quality.