Fabrication and characterizations of large homoepitaxial single crystal diamond grown by DC arc plasma jet CVD

► Homoepitaxial single crystal diamond was grown by DC arc plasma jet CVD. ► The influence of different deposition parameters on CVD diamond growth was studied. ► Large size freestanding single crystal diamond plate was fabricated. ► Properties of the CVD epitaxial diamond were close to Type IIa natural diamond.