Improving diamond coating on Ti6Al4V substrate using a diamond like carbon interlayer: Raman residual stress evaluation and AFM analyses

► We measured residual stresses by Raman spectroscopy in thin diamond coatings. ► Measurements were made on samples with and without a DLC interlayer. ► We showed the interest of using a DLC interlayer to lower the residual stresses. ► We validate the use of the TMCVD technique to lower the residual stresses. ► A qualitative evaluation of the quality and surface roughness of samples was made.