Boron incorporation issues in diamond when TMB is used as precursor: Toward extreme doping levels

► New strategies to grow (100) diamond layers using TriMethylBoron (TMB) as doping gas. ► Fabrication of (100) low doped diamond with state of art RT mobilities. ► Links between growth conditions and boron incorporation into the diamond matrix. ► Metal-SC transition in metallic wall reactors using TMB as doping gas.