کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7144444 1462062 2016 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synergetic PEDOT degradation during a reactive ion etching process
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
Synergetic PEDOT degradation during a reactive ion etching process
چکیده انگلیسی
Conjugated polymer etching is a key step in the integration of electro-chemical devices into microsystems, and one of the most important challenges for this type of material is to achieve fast etching with commercially available equipment. Conjugated polymer electrochemical devices are promising as they are used in different devices such as OLED, sensors, supercapacitors and actuators. The recent emergence of conducting interpenetrating polymer network actuators (IPN) based on poly(3,4-ethylenedioxythiophene) (PEDOT) has allowed operation frequencies of over 1 kHz to be attained, thus pushing the limits of the conjugated polymer technology. The plasma dry etching step of these PEDOT-based active mechanical devices, with high etching rates of around 2 μm min−1, enables the production of these electrochemomechanical devices. To understand the high etching rate of these materials a systematic study of the chemical degradation mechanism of each polymer has been carried on. From the analysis of the etching of all the polymer actuator components, a chemical self-degradation mechanism is proposed to explain the surprisingly high etching rate obtained for PEDOT based materials. Finally, to conclude this study, the usefulness of this fast etching is demonstrated with the operation of standalone micro-beam actuators.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 229, 28 June 2016, Pages 635-645
نویسندگان
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